History of Cleanrooms by Philip Naughton

By Anthony Chien
President, American Cleanroom Systems ®
40+ years of cleanroom design and engineering experience
Last reviewed: June 2026

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The History of Cleanrooms by Philip Naughton.  From 1800's watch manufacturing to modern day semiconductor cleanrooms.  Includes history of HEPA filters, Willis Whitfield 1964 patent, and development of cleanroom standards. Published by ASHRAE. 

Topics covered

• The first cleanrooms
  • Hospitals
  • Precision manufacturing and contamination control
• History of HEPA filters
• 90 fpm and laminar flow
• Willis Whitfield’s1964 patent for laminar flow cleanroom
• Cleanrooms standards development over the years
• Semiconductor cleanrooms

History of Cleanrooms By Philip Naughton, Member Ashrae

Other good articles on invention of cleanroom

The 1st Cleanroom - The Chip History Center

A Revolutionary Invention - Cleanroom Technology

Philip Naughtons “History of Cleanrooms” is wonderful narrative of the first cleanrooms thru the development of modern day cleanrooms.  It includes Willis Whitfield’s 1964 patent for laminar flow cleanrooms. There is history of the development cleanroom classification standards. Highly recommend for anybody who works in cleanroom industry.