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History of Cleanrooms by Philip Naughton

The History of Cleanrooms by Philip Naughton.  From 1800's watch manufacturing to modern day semiconductor cleanrooms.  Includes history of HEPA filters, Willis Whitfield 1964 patent, and development of cleanroom standards. Published by ASHRAE. 

Drawing of first cleanroom, hand drawn, Willis Whitfield
Figure 1.  First cleanroom design 

Topics covered

  • The first cleanrooms
    • Hospitals
    • Precision manufacturing and contamination control
  • History of HEPA filters
  • 90 fpm and laminar flow
  • Willis Whitfield’s1964 patent for laminar flow cleanroom
  • Cleanrooms standards development over the years
  • Semiconductor cleanrooms

History of Cleanrooms By Philip Naughton, Member Ashrae

Other good articles on invention of cleanroom

The 1st Cleanroom - The Chip History Center

A Revolutionary Invention - Cleanroom Technology

Philip Naughtons “History of Cleanrooms” is wonderful narrative of the first cleanrooms thru the development of modern day cleanrooms.  It includes Willis Whitfield’s 1964 patent for laminar flow cleanrooms. There is history of the development cleanroom classification standards. Highly recommend for anybody who works in cleanroom industry.

Author: The author Anthony Chien has worked at American Cleanroom Systems for past 12 years.  He has more than 40 years of cleanroom experience. Anthony has a BS and MS in Electrical Engineering specializing in semiconductor manufacturing from the University of Illinois. American Cleanroom Systems is a design build modular cleanroom manufacturer based in Rancho Santa Margarita CA. It is expert in ISO-5 through ISO-8 (class 100 to class 100k) modular cleanrooms for pharmaceutical cleanrooms, medical device cleanrooms, and industrial cleanrooms.

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