How Much Does a Cleanroom Cost?

Cleanrooms can cost between $75 to $1500 per square foot, depending on technical requirements. Biggest influences on cost are cleanroom classification, temperature requirements, material selection, and special equipment like air showers.

pile of cash
Figure 1. A pile of cash
The biggest factor in cleanroom cost is the ISO-14644-1 cleanroom classification. The cleaner the cleanroom the more HEPA filtration is required to achieve the higher air changes per hour.
Design Requirements for Cleanroom Classifications
Criteria Class 10 ISO4 Class 100 ISO5 Class 1000 ISO6 Class 10,000 ISO7 Class 100,000 ISO8
Air changes per HR/Min 500-600 / 8 to 10 300 to 480 / 5 to 8 180 / 3 60 / 1 20 / 0.33
Filter coverage % 90 – 100 60 – 70 20 – 30 7 – 15 4 – 5
CFM per square foot 85 – 90 36 – 65 18 – 32 9 – 16 4 – 8
Filter Efficiency 99.9997%
ULPAs
99.997%
HEPAs
99.997%
HEPAs
99.997%
HEPAs
99.97%
HEPAs
Table 1: Cleanroom classification - Air changes per hour vs. class 

Cleanroom air conditioning is typically the 2nd biggest factor in cleanroom cost. Extremely tight temperature (+1 degree C) and humidity (+10%) requirements can require expensive custom air handlers for each room with hot and cold water oscillating valves, cleanroom AC control systems, cleanroom boiler, cleanroom chiller, cleanroom humidifier and dedicated make up air AC unit. To reach an even tighter specification, very expensive 100% HEPA ceiling coverage, ducted HEPA filters and raised flooring are used. High cleanroom process heat load and exhaust cfm also will increase the size, complexity and cost of the cleanroom air conditioning.

Figure 2. Cleanroom chiller
Cleanroom material selection is a key contributor to cleanroom cost. Pharmaceutical cleanrooms typically require more expensive FRP modular walls and heat welded vinyl floors due to the strong chemicals they use to sterilize the cleanroom. Semiconductor cleanrooms are very concerned about ESD (electrostatic discharge) so the use of expensive static dissipative painted aluminum modular walls and static dissipative heat welded vinyl floors.
Figure 3. Grounded cleanroom static dissipative heat welded vinyl flooring
Special features such as air showers, motorized roll up doors, cleanroom monitoring systems, and interlock systems can also significantly raise the cost of your cleanroom.
“cleanroom air shower””white walls” “store front door”
Figure 4. Cleanroom Air shower
Figure 5. Cleanroom monitoring system
Another contributing factor to cleanroom cost is the height of cleanroom. Taller cleanrooms require more HEPA filtration, more air conditioning, and more expensive structural support frame.
“High bay cleanroom” “glass windows”
Figure 6. High Bay Aerospace Cleanroom

Summary

Cleanrooms typically cost between $75 and $1,500 per square foot. Cleanroom classification is most important factor in cleanroom cost. Cleanroom HVAC – temperature and humidity requirements are commonly the 2nd largest factor in cleanroom cost.

Special material requirements like chemically resistant FRP walls for the pharmaceutical industry and static dissipative walls and floors the semiconductor industry will increase cleanroom cost.

Also, special cleanroom equipment like air showers, motorized roll up doors and cleanroom monitoring systems add cost. Finally, higher than normal cleanroom height requirements will also increase cleanroom cost.

The author Anthony Chien has worked at American Cleanroom Systems for past 12 years.  He has more than 40 years of cleanroom experience. Anthony has a BS and MS in Electrical Engineering specializing in semiconductor manufacturing from the University of Illinois.

American Cleanroom Systems is a design build modular cleanroom manufacturer based in Rancho Santa Margarita CA. It is expert in ISO-5 through ISO-8 (class 100 to class 100k) modular cleanrooms for pharmaceutical cleanrooms, medical device cleanrooms, and industrial cleanrooms.

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